The design of the Planar ServoRing(TM) rotary table PSR150 was optimized to minimize stage height.
The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. Planar ServoRing(TM) rotary table PSR150 has large clear center aperture that can be used for air or wire line feed-through or beam delivery
Brushless Direct Drive maximizes positioning performance of the Planar ServoRing(TM) by utilizing three phase planar brushless motor technology.
"Lo-Cog" magnetic design assures smooth rotation and dynamic performance
Accurate Positioning and performance are assured with 18,000 lines encoder that results in 0.1 arc-sec positioning resolution.
The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make Planar ServoRing(TM) rotary table PSR150 the ideal solution for applications requiring frequent directional changes.
Features:
-Large center aperture
-Low profile
-Unlimited rotation
-High torque motors
-Precision bearings
-High resolution feedback
Specifications:
-torque 50 Nm
-resolution 0.1 arc-sec
-repeatability 0.5 arc-sec
-accuracy 10 arc-sec
-run-out 5 microns
-table height 42 mm
-table OD 150 mm
-center aperture 10 mm
|
